Warsaw University of Technology / Research / Catalogue of Research Projects of Warsaw University Of Technology / Development of science and knowledge / Faculty of Mechatronics

Methodology for determination of MEMS/MOEMS reliability

supervisor Michał Józwik, Ph.D.
e-mail jozwik@mchtr.pw.edu.pl
tel. +48 22 234 86 35
beginning 2006.10.23
end 2008.10.22

Aim of project
The aim of this project is elaboration and testing of experimental-numerical methodology proposed for reliability studies of MEMS/MOEMS components. The methodology is based on interaction of experimental data from the optical measurement method and numerical solutions for models of the studied object. Additionally, there will be universal procedures of descriptions of main mechanical and reliability parameters for selected MEMS/MOEMS devices working in different environment conditions.

In the project we focus on MEMS actuators: their lifetime, mechanical performance and changes due to fatigue and thermal ageing.

Expected results
Development of theory, numerical solutions and laboratory experimental setups, enabling reliability studies and quality assessment of MEMS/MOEMS components.